[1] Jiang W H. Overview of adaptive optics development[J]. Opto-Electronic Engineering, 45, 170489(2018).
[2] Guan C L, Zhang X J, Deng J M et al. Deformable mirror technologies at Institute of Optics and Electronics, Chinese Academy of Sciences[J]. Opto-Electronic Engineering, 47, 200337(2020).
[3] Madec P Y. Overview of deformable mirror technologies for adaptive optics and astronomy[J]. Proceedings of SPIE, 8447, 844705(2012).
[4] Liu J, Zhao C J. Influence of actuator position deviation on low-frequency phase fitting capability of deformable mirror[J]. High Power Laser and Particle Beams, 24, 1029-1032(2012).
[5] Cao F, Wang J H, Zhang S Q et al. Compensation capacity of low order aberration using single actuator deformable mirror[J]. Journal of Applied Optics, 36, 310-313(2015).
[6] Yu J C, Tian B Y, Zhong Z Q et al. Method for annular aberration correction of large-aperture thin-wall tube lasers[J]. Chinese Journal of Lasers, 47, 0905001(2020).
[7] Zhou H, Wang X, Liu Q et al. Active deformation mirror with variable thickness[J]. Acta Optica Sinica, 41, 2422001(2021).
[8] Chen K, Chen J J, Mao Y X et al. Simulation and experiment of 214-element unimorph deformable mirror with edge-driven[J]. Acta Photonica Sinica, 45, 0822004(2016).
[9] Cao S, Zhang Z G, Zhao Z Y et al. Optimized design of high efficient voice coil actuator in deformable mirror[J]. Chinese Journal of Liquid Crystals and Displays, 35, 1110-1119(2020).
[10] Liu X Y, Cao S, Hu D T et al. Design of voice-coil deformable mirror and its mechanical characteristics[J]. Chinese Journal of Liquid Crystals and Displays, 35, 801-807(2020).
[11] Liu L H, Tan B T, Mai C J. Structural parameter design and performance simulation of 241-element deformable mirror[J]. Laser & Optoelectronics Progress, 56, 090101(2019).
[12] Wu W B, Dai Y F, Guan C L et al. Optimization design for transversal piezoelectric effect deformable mirror[J]. Infrared and Laser Engineering, 45, 0818003(2016).
[13] Xie L, Zhong Z Q, Zhang B. Influence of partially failed actuators of power failure on correction ability of deformable mirrors[J]. Acta Optica Sinica, 41, 0223001(2021).
[14] Ma J Q, Liu Y, Chen J J et al. Design and performance testing of 200-element silicon unimorph deformable mirror[J]. Optics and Precision Engineering, 22, 2047-2053(2014).
[15] Yang K K, Wang D E, Yuan Q et al. Research on multidisciplinary simulation and optimal design method of high bandwidth piezoelectric deformable mirror[D](2021).
[16] Ma Y J, Yun W X. Research progress of genetic algorithm[J]. Application Research of Computers, 29, 1201-1206, 1210(2012).
[17] Fan X L, Guan C L, Rao C H. Wave-front fitting capability analysis of 1.8 m telescope’s adaptive secondary mirror[J]. Acta Optica Sinica, 31, 0822002(2011).
[18] Tang H, Guo P Z. Phase compensation in non-Kolmogorov atmospheric turbulence[J]. Optik, 125, 1227-1230(2014).
[19] Ding X Z. Analysis and research on the fitting residual error of deformable mirror[D](2007).
[20] Li Z L, Guan C L, Dai Y F et al. Optical surface error analysis and compensation technique based on Zernike polynomial coefficients[J]. Proceedings of SPIE, 12071, 1207108(2021).
[21] Cheng X M, Wang J D, Hu Y et al. Simulation analysis on the design of the PZT stacked array deformable mirror[J]. Proceedings of SPIE, 12059, 120591A(2021).
[22] Xu H[M]. Machine design handbook-volume one(1991).
[23] Dibaee B, Jafari A, Amniat-Talab M et al. Hartmann test with minimum apertures for retrieving the atmospheric primary aberrations[J]. Journal of Modern Optics, 67, 760-770(2020).