Lapping performance on quartz glass of fixed abrasive pad embedded with multi-grain diamond grits

Zhu Yongwei; Shen Qi; Wang Zikun; Ling Shunzhi; Li Jun; Zuo Dunwen

doi:10.3788/irla201645.1003003

[1] Su Ying, He Xingyang, Xiang Zaikui, et al. Structural defects and formation mechanism in silica glasses[J]. Journal of Wuhan University of Technology, 2007, 29(8): 50-54. (in Chinese)

[2] Yang Minghong, Zhao Yuan′an, Su Hanhan, et al. Influence of subsurface cracks on the laser damage resistance of anti-reflection coated fused silica[J]. Chinese Journal of Lasers, 2012, 39(8): 0807001. (in Chinese)

[3] Guo Shaofeng, Lu Qisheng, Yin Yan, et al. Theoretical study on damage thresholds for elastic stress fracture in laser-irradiated optical glass[J]. Infrared and Laser Engineering, 2004, 33(2): 133-137. (in Chinese)

[4] Wang Zhuo, Wu Yuguang, Dai Yifan, et al. Characterization of Subsurface Damage of Optical Materials in Lapping Process[J]. Nanotechnology and Precision Engineering, 2008, 6(5): 349-355. (in Chinese)

[5] Shen J, Liu S, Yi K, et al. Subsurface damage in optical substrates[J]. Optik-International Journal for Light and Electron Optics, 2005, 116(6): 288-294.

[6] Yuan Julong, Wang Zhiwei, Wen Donghui, et al. Review of the current situation of ultra-precision machining[J]. Chinese Journal of Mechanical Engineering, 2007, 43(1): 35-48. (in Chinese)

[7] Wang Zhuo, Wu Yulie, Dai Yifan, et al. Rapid detection of subsurface damage of optical materials in lapping process and its influence regularity[J]. Optics and Precision Engineering, 2008, 16(1): 16-21. (in Chinese)

[8] Yang Minghong, Zhao Yuan′an, Yi Kui, et al. Subsurface damage characterization of ground fused silica by HF etching combined with polishing layer by layer[J]. Chinese Journal of Lasers, 2012, 39(3): 0303007. (in Chinese)

[9] Wang Wenze, Li Jun, Xia Lie, et al. Effect of abrasive sizes on lapping performance of fixed abrasive pad when machining quartz glass[J]. Diamond & Abrasives Engineering, 2015(2): 9-13. (in Chinese)

[10] Zhu Nannan, Zhu Yongwei, Li Jun, et al. Subsurface damage depth of lithium niobate crystal in lapping[J]. Optics and Precision Engineering, 2015, 23(12): 3387-3394. (in Chinese)

[11] Gao P, Li J, Zhu Y W, et al. Study on subsurface damage after fixed-abrasive lapping with different particle size [J]. Solid State Phenomena, 2011, 175: 112-115.

[12] Liu Tingting, Zhu Yongwei, Wang Jiashun, et al. Influence of Ni covering ratio of diamond on maching performance of fixed abrasive pad[J]. Infrared and Laser Engineering, 2014, 43(12): 4045-4050. (in Chinese)

[13] Chen F, Gen X U, Chun-De M A, et al. Thermal residual stress of polycrystalline diamond compacts[J]. Transactions of Nonferrous Metals Society of China, 2010, 20(2): 227-232.

[14] Li Chunlin, Chen Jian. Preparation of polycrystalline diamond powders and its yield and wear resistance[J]. Materials for Mechanical Engineering, 2012(6): 17-19. (in Chinese)

[15] Gao Kai. Study on preparation and functional properties of polycrystalline diamond materials[D]. Tianjin: Tianjin University, 2011. (in Chinese)