• Journal of Infrared and Millimeter Waves
  • Vol. 22, Issue 1, 45 (2003)
[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. THE STUDY OF A AUTO ELLIPSOMETER SYSTEM BY USING A TWO-DIMENSIONAL CCD ARRAY DETECTOR[J]. Journal of Infrared and Millimeter Waves, 2003, 22(1): 45 Copy Citation Text show less
    References

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    [6] Woollam J A, Snyder P G, Rost M C. Variable angle spectroscopic ellipsometry: a nondestructive characterization technique for ultrathin and multiplayer materials. Thin Solid Films, 1988, 166: 317-323

    [7] Jellison G E, Modine F A. Two-channel polarization modulation ellipsometer. Apply Optics, 1990, 29: 959-973

    [8] Chen L Y, Feng X W, Su Y. Design of a scanning ellipsometer by synhchronous rotation of the polarizer and analyzer. Apply Optics, 1994, 33: 1299

    [9] Xia G Q, Zhang R J, Chen Y L. New design of the variable angel infrared spectroscopic ellipsometer using double Fourier transforms. Review Science Instrument, 2000, 71: 2677

    [10] Palik Edward D. Handbook of Optical Constant of Solids. London: Academic Press, 1985: 350

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. THE STUDY OF A AUTO ELLIPSOMETER SYSTEM BY USING A TWO-DIMENSIONAL CCD ARRAY DETECTOR[J]. Journal of Infrared and Millimeter Waves, 2003, 22(1): 45
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