• Journal of Infrared and Millimeter Waves
  • Vol. 22, Issue 1, 45 (2003)
[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
Author Affiliations
  • [in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. THE STUDY OF A AUTO ELLIPSOMETER SYSTEM BY USING A TWO-DIMENSIONAL CCD ARRAY DETECTOR[J]. Journal of Infrared and Millimeter Waves, 2003, 22(1): 45 Copy Citation Text show less

    Abstract

    A new type of CCD ellipsometer was designed and constructed to study the optical properties of materials in 5000~10000 angstrom wavelength range. In the system, the polarizer are driven by a stepping motor that have hollow shafts. The traditional spectroscopic monochromator and photomultiplier were replace by a two-dimensional Si-Based CCD array detector and an integrated grating consisting of three sub-gratings to avoid mechanical transmission, vibration problems and scanning grating entirely. It makes the system simple and reliable, and shorten the time of measurement greatly. The system adopted the technique of arranging CCD Spectrometer at the back. Thus, a series of problems were investigated and solved including the optical principle, instrument design, system calibration, spectra measurement and data analysis. The results from the measured spectra of the complex refractive index for a gold-film sample are presented. It well agrees with the value based on the Drude theory.
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. THE STUDY OF A AUTO ELLIPSOMETER SYSTEM BY USING A TWO-DIMENSIONAL CCD ARRAY DETECTOR[J]. Journal of Infrared and Millimeter Waves, 2003, 22(1): 45
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