[1] XU Ke-jun. Research and Application of Capacitive Transducer [M]. Beijing:Tsinghua University Press,1994:1-12.

[2] ZHANG Yin-fang. Principle and Characteristic of Capacitive Displacement Transducer [J]. Aviation Precision Manufacturing Technology,2005,41(4):58-59.

[3] Kim M,Moon W,Yoon E,et al. A New Capacitive Displacement Sensor with High Accuracy and Long-range [J]. Sensors and Actuators A: Physical(S0924-4247),2006,130/131:135-141.

[4] Andermo N I. Capacitance-type measuring device for absolute measurement of positions:US,5053715 [P]. 1991-10-01.

[5] LIU Wei-guang ,WANG Yong-min. A New Digital Display Capacitive Displacement Transducer [J]. Measurement Technique,1996(8):7-9, 30.

[6] MAO Qian-min,LIU An-kun,SHEN Wei-min,et al. Research on Fusion Measurement System of Grating and Capacitive Grating with Nanometer Resolution [J]. Chinese Journal of Sensors and Actuators,2006,19(5):1519-1522.

[7] ZHANG Zeng-yao,LUO Jia-xian. Capacitive Grating Technology [M]. Beijing:China Metrology Publishing House,2002:4-13.

[8] WANG Xi-wen,QI Xin,SONG Yu-quan. Capacitive Transducer and its Development Prospect [J]. Journal of Jilin University of Technology:Natural Science Edition,2003,33(2):89-94.

[9] Mohan N M,Shet A R,Kedarnath S,et al. Digital Converter for Differential Capacitive Sensors [J]. IEEE Transactions on Instrumentation and Measurement(S0018-9456),2008,57(11):2576-2581.

[10] YUE Qiu-hong ,WANG Bai-ming ,HONG Yue-wei , et al. A 12-Bit Dual-Ramp Analog-to-Digital Converter [J]. Microelectronics,2008,38(4):558-561