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    Journals >Acta Optica Sinica >Volume 35 >Issue 1 >Page 122005 > Article
    • Acta Optica Sinica
    • Vol. 35, Issue 1, 122005 (2015)
    A Mixed Gradient Algorithm for High Performance DOE Design in Off-Axis Lithography Illumination System
    Song Qiang1、2、*, Zhu Jing1、2, Wang Jian1、2, Zhang Fang1、2, Lü Xiangbo1、2, Yang Baoxi1、2, and Huang Huijie1、2
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201535.0122005 Cite this Article Set citation alerts
    Song Qiang, Zhu Jing, Wang Jian, Zhang Fang, Lü Xiangbo, Yang Baoxi, Huang Huijie. A Mixed Gradient Algorithm for High Performance DOE Design in Off-Axis Lithography Illumination System[J]. Acta Optica Sinica, 2015, 35(1): 122005 Copy Citation Text show less
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    Song Qiang, Zhu Jing, Wang Jian, Zhang Fang, Lü Xiangbo, Yang Baoxi, Huang Huijie. A Mixed Gradient Algorithm for High Performance DOE Design in Off-Axis Lithography Illumination System[J]. Acta Optica Sinica, 2015, 35(1): 122005
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