• Chinese Optics Letters
  • Vol. 22, Issue 10, 101301 (2024)
Lixin Liu1, Jun Gou1,2,3,*, Chunyu Li1, Jiayue Han1..., Xiutao Yang1, Jin Chen1, Zijian Zhang1, Zheyuan Xie1, He Yu1,2, Zhiming Wu1,2 and Jun Wang1,2|Show fewer author(s)
Author Affiliations
  • 1School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
  • 2State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
  • 3Key Laboratory of Science and Technology on Infrared Detector, Luoyang 471099, China
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    DOI: 10.3788/COL202422.101301 Cite this Article Set citation alerts
    Lixin Liu, Jun Gou, Chunyu Li, Jiayue Han, Xiutao Yang, Jin Chen, Zijian Zhang, Zheyuan Xie, He Yu, Zhiming Wu, Jun Wang, "Enhanced efficiency of high-speed Si and Si-based PbSe MSM photodiodes with integrated photon-trapping holes at 800–1550 nm wavelengths," Chin. Opt. Lett. 22, 101301 (2024) Copy Citation Text show less

    Abstract

    We theoretically and experimentally demonstrate a cylinder-shaped hole array with a small depth and an appropriate period integrated on a silicon-on-insulator substrate can enhance infrared absorption due to more bending of light and a higher back reflection. The Si metal-semiconductor-metal (MSM) photodiode with an hole array, whose depth is 250 nm, exhibits a 4-fold improved external quantum efficiency (EQE) of 81%, and an ultra-fast impulse response speed of 22 ps enabling a 3 dB bandwidth of up to 23.9 GHz. PbSe film with a thickness of 80 nm is integrated to broaden the response wavelength. A more than 500% EQE enhancement of the Si-based PbSe photodiode with 150-nm-deep photon-trapping holes is achieved at 1550 nm compared to the device without hole structures.
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    Lixin Liu, Jun Gou, Chunyu Li, Jiayue Han, Xiutao Yang, Jin Chen, Zijian Zhang, Zheyuan Xie, He Yu, Zhiming Wu, Jun Wang, "Enhanced efficiency of high-speed Si and Si-based PbSe MSM photodiodes with integrated photon-trapping holes at 800–1550 nm wavelengths," Chin. Opt. Lett. 22, 101301 (2024)
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