Design of microlens array of infrared two-band laminated structure detector

Xu Zhengkui; Li Xiaobin; Le Lizhu; Yu Zhenlong; He Jun; Wang Chunxing

doi:10.3788/irla201948.0803003

Journals >Infrared and Laser Engineering >Volume 48 >Issue 8 >Page 803003 > Article

Infrared and Laser Engineering
Vol. 48, Issue 8, 803003 (2019)

Design of microlens array of infrared two-band laminated structure detector

Xu Zhengkui^*, Li Xiaobin, Le Lizhu, Yu Zhenlong, He Jun, and Wang Chunxing

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[in Chinese]

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DOI: 10.3788/irla201948.0803003 Cite this Article

Xu Zhengkui, Li Xiaobin, Le Lizhu, Yu Zhenlong, He Jun, Wang Chunxing. Design of microlens array of infrared two-band laminated structure detector[J]. Infrared and Laser Engineering, 2019, 48(8): 803003 Copy Citation Text

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References

[5] Liu Yuling, Lu Zhenwu, Sun Qiang. Effect of changing design parameters on diffractive microlens[J]. Infrared and Laser Engineering, 2004, 33(4): 414-417. (in Chinese)

[6] Dong Xiaochun, Du Chunlei, Chen Bo, et al. The simulation analysis for photolithography process of microlens array[J]. Micronano Electronic Technology, 2003, 12: 39-42. (in Chinese)

[7] Du Chunlei, Qiu Chuankai, Deng Qiling, et al. Study on the integrated chip of microlens array with IR detector array[J]. Opto-Eletronic Engineering, 2003, 30(1): 1-4. (in Chinese)

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