Author Affiliations
11. School of Electro-Optical Engineering, Changchun University of Science and Technology, Changchun 130022, China22. CAS Key Laboratory for Nanophotonic Materials and Devices, Nanofabrication Laboratory, CAS Excellent Center for Nanoscience, National Center for Nanoscience and Technology, Beijing 100190, Chinashow less
Fig. 1. Flow chart of NIL
(a): Immobilization of template and substrate; (b):Pressing and curing NIL resist;(c): Template-substrate separation for demolding
Fig. 2. (a) 3D isometric view of hexagonal nanopore/Au particle models (L=300 nm, D=200 nm, H=300 nm); (b) Schematic illustration (section view) of LSPR and SPP effects existing in each unit cell
Fig. 3. The effect of vertical configuration on the stress distribution
(a): 3D model of monolayer template; (b): 3D model of dual-layer template with a stress-homogenized zone; (c): Equivalent stress distribution on patterned area of monolayer template calculated by FEA method; (d): Equivalent stress distribution on patterned area of dual-layer template calculated by FEA method; (e): Equivalent stress distribution on 72% patterned area of monolayer template; (f): Equivalent stress distribution on 72% patterned area of dual-layer template; (g): Distribution diagram of low and high stress areas over patterns of the template; (h): Percentage stacked histogram of stress values of two models
Fig. 4. (a—c) Schematic diagrams of dual-layer template with the size of (a) 7 mm, (b) 11 mm and (c) 15 mm;and their stress distributions (d—f) derived from FEA calculation, respectively
Fig. 5. Fabrication process and structure of template
(a): Three-dimensional flow chart of nanostructures convex on silicon template prepared by electron beam lithography, plasma enhanced reactive ion etching, lift-off process, etc; (b): Schematic diagram of the stress-homogenized zone on silicon template; (c)—(e): SEM images of hexagonal nanostructures of template
Fig. 6. The photos of the quartz substrate surfaces after NIL using dual-layer templates with a size of (a) 15 mm, (b) 11 mm, (c) 7 mm and (d) using monolayer template with 7 mm side length; The lower right corner of each figure is the schematic diagram of executing template
Fig. 7. SEM images of hexagonal nanopore arrays with imprint resist on surface of a quartz substrate obtained by dual-layer template with a size of 7 mm
(a): Side view; (b): Vertical view; (c): Section view; (d): Side view after depositing Au nanoparticles
Fig. 8. Detection of R6G molecules by using SERS chips
(a): Raman spectra of R6G molecules with concentrations ranging from 1×10-11 to 1×10-5 mol·L-1 decorated on the SERS chips, respectively; (b): The calibration curves of the intensity of the peak at 1 360 cm-1 versus the logarithmic concentration for R6G molecules detection; (c): Bar graph of Raman intensity at 80 test points on SERS chip
Fig. 9. Hg ions detection by the SERS chips modified with bpy
(a): Raman spectra of Hg ions with different concentrations; (b): The relationship between Raman signal intensity (at 1 610 cm-1) and concentration of Hg ions