TAO Feng-gang, YAO Jun, WANG Wei-min, ZHUANG Xu-ye, ZHANG Heng, HU Fang-rong. Analysis of Characteristics of Micromachined Electrostatic Repulsive Actuator[J]. Opto-Electronic Engineering, 2011, 38(12): 41
Search by keywords or author
- Opto-Electronic Engineering
- Vol. 38, Issue 12, 41 (2011)
Abstract
Set citation alerts for the article
Please enter your email address