High-performance thin-film electro-optical modulator based on heterogeneous silicon and lithium niobate platform (Invited)

Shihao Sun; Xinlun Cai

doi:10.3788/IRLA20211047

Journals >Infrared and Laser Engineering >Volume 50 >Issue 7 >Page 20211047 > Article

Infrared and Laser Engineering
Vol. 50, Issue 7, 20211047 (2021)

High-performance thin-film electro-optical modulator based on heterogeneous silicon and lithium niobate platform (Invited)

Shihao Sun and Xinlun Cai

Author Affiliations

State Key Laboratory of Optoelectronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou 510006, China

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DOI: 10.3788/IRLA20211047 Cite this Article

Shihao Sun, Xinlun Cai. High-performance thin-film electro-optical modulator based on heterogeneous silicon and lithium niobate platform (Invited)[J]. Infrared and Laser Engineering, 2021, 50(7): 20211047 Copy Citation Text

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Hybrid silicon and lithium niobate electro-optical modulator. (a) Schematic of Mach-Zender intensity modulator; (b) SEM image of lithium niobate phase modulation region; (c) The cross section SEM image of the modulation region, the section is formed by the focused ion beam process; (d) Image of the whole chip

Fig. 1. Hybrid silicon and lithium niobate electro-optical modulator. (a) Schematic of Mach-Zender intensity modulator; (b) SEM image of lithium niobate phase modulation region; (c) The cross section SEM image of the modulation region, the section is formed by the focused ion beam process; (d) Image of the whole chip

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