Yueying Wang, Xu Liu, Xiang Hao. Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement[J]. Laser & Optoelectronics Progress, 2023, 60(8): 0811007
- Laser & Optoelectronics Progress
- Vol. 60, Issue 8, 0811007 (2023)
Fig. 1. Imaging schematic of wide field microscope and confocal microscope. (a) Wide field microscope; (b) confocal microscope
![Schematic of the Nipkow disk[17]](/richHtml/lop/2023/60/8/0811007/img_02.jpg)
Fig. 2. Schematic of the Nipkow disk[17]
Fig. 3. Different confocal scanning methods and scanning schematic on the sample plane. (a) (e) Single point scanning confocal microscopy based on GM; (b) (f) confocal microscopy using Nipkow disk; (c) (g) parallel scanning confocal microscopy based on SLM; (d) (h) line scanning confocal microscopy
Fig. 4. Laser differential confocal for axial localization. (a) Laser differential confocal[37]; (b) divided-aperture differential confocal[45]
Fig. 5. Dual-detection confocal for axial localization[49]
Fig. 6. Spectrally encoded confocal microscopy[53]
Fig. 7. Confocal imaging system. (a) Schematic of dispersion confocal imaging system[59]; (b) principle of dispersion confocal fast detection based on transmission detection[60]
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Table 1. Comparison of different confocal methods for 3D topography measurement
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