Research on flying cutting technology with micro pyramid array structure

Du Dan; Huang Yuetian; Fan Bin

doi:10.12086/oee.2020.190179

[1] Laux E, Genet C, Skauli T, et al. Plasmonic photon sorters for spectral and polarimetric imaging[J]. Nature Photonics, 2008, 2(3): 161–164.

[2] Chen Q, Cumming D R S. High transmission and low color cross-talk plasmonic color filters using triangular-lattice hole ar-rays in aluminum films[J]. Optics Express, 2010, 18(13): 14056–14062.

[3] Lee H S, Yoon Y T, Lee S S, et al. Color filter based on a sub-wavelength patterned metal grating[J]. Optics Express, 2007, 15(23): 15457–15463.

[4] Yamazaki K, Namatsu H. 5-nm-order electron-beam lithography for nanodevice fabrication[J]. Japanese Journal of Applied Physics, 2004, 43(6S): 3767.

[5] Melngailis J. Focused ion beam lithography[J]. Nuclear Instruments and Methods in Physics Research Section B: Beam In-teractions with Materials and Atoms, 1993, 80–81: 1271–1280.

[6] Shao J Y, Ding YC, Zhai H P, et al. Fabrication of large curvature microlens array using confined laser swelling method[J]. Optics letters, 2013, 38(16): 3044–3046.

[7] Zhang Y L, Chen Q D, Xia H, et al. Designable 3D nanofabrica-tion by femtosecond laser direct writing[J]. Nanotoday, 2010, 5(5): 435–448.

[8] Le D, Lee J M, Kim S J, et al. Burr analysis in microgrooving[J]. The International Journal of Advanced Manufacturing Technol-ogy, 2010, 50(5–8): 569–577.

[9] Deng Y J, Yi PY, Peng L F, et al. Experimental investigation on the large-area fabrication of micro-pyramid arrays by roll-to-roll hot embossing on PVC film[J]. Journal of Micromechanics and Microengineering, 2014, 24(4): 045023.

[10] Yan J W, Oowada T, Zhou T F, et al. Precision machining of microstructures on electroless-plated NiP surface for molding glass components[J]. Journal of Materials Processing Technol-ogy, 2009, 209(10): 4802–4808.

[11] Zhu Z W, To S, Zhang S J. Theoretical and experimental inves-tigation on the novel end-fly-cutting-servo diamond machining of hierarchical micro-nanostructures[J]. International Journal of Machine Tools and Manufacture, 2015, 94: 15–25.

[12] Chao. Study on fabricating of micro-pyramid array by precision diamond turning[J]. Procceding of SPIE, 2013, 8769: 87691C.

[13] Wu D X,Li G, Wang B, et al. Fabrication of microstructured surfaces by five-axis ultra precision machine tool[J]. Key Engi-neering Materials, 2014, 625: 187–191.