• Laser & Optoelectronics Progress
  • Vol. 48, Issue 12, 123101 (2011)
Li Chunxi1、*, Deng Huaqiu1, and Ren Hao2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/lop48.123101 Cite this Article Set citation alerts
    Li Chunxi, Deng Huaqiu, Ren Hao. Design of Embedded Wide Spectrum Online Monitoring System of Film Thickness[J]. Laser & Optoelectronics Progress, 2011, 48(12): 123101 Copy Citation Text show less
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    Li Chunxi, Deng Huaqiu, Ren Hao. Design of Embedded Wide Spectrum Online Monitoring System of Film Thickness[J]. Laser & Optoelectronics Progress, 2011, 48(12): 123101
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