Warm laser peening process (WLP) is an innovative processing technique, which combines the advantages of laser peening (LP) and dynamic strain aging (DSA). In order to study the effect of different process temperatures on the thermal surface stability of WLP IN718, the LP(25 ℃) IN718 and WLP(230 ℃, 260 ℃, 290 ℃, 320 ℃ ) IN718 are served as the research objects. From the view points of compressive residual stress, nanohardness and elasticity modulus, the effects of different process temperatures on the thermal surface stability of WLP IN718 are explored by thermal insulation test and nano-indentation test. The results show that the compressive residual stress presents an decreasing trend with increasing the WLP temperature. LP and WLP samples thermal relaxation amplitude increase significantly with increasing the applied temperature, and the WLP samples have a better performance. WLP (260 ℃) IN718 has a best performance on thermal stability and nano-hardness, and the load-displacement curve further evidences the effect of temperature on thermal relaxation of WLP IN718 superalloy.