Jian SHEN, Chenglong FENG, Xun ZHANG, Lei ZHANG, Chang SHU, Yong ZHANG, Yikai SU. Research Progress in Optoelectronics Integration Technology Based on Piezoelectric Effect（Invited）[J]. Acta Photonica Sinica, 2023, 52(11): 1113001
- Acta Photonica Sinica
- Vol. 52, Issue 11, 1113001 (2023)
Fig. 2. Morphotropic phase boundary in a ferroelectric PZT system（PbZrO3-PbTiO3）［41］
Fig. 3. Characterization of orthorhombic ferroelectric phases in thin-film HfO2［42］
Fig. 4. Schematic diagram of lithium niobate crystal structure［57］
Fig. 5. Schematic diagram and advantages of the piezoelectric effect［10］
Fig. 8. Low-power piezo-optomechanically tuning device based on Zr-doped HfO2［8］
Fig. 11. AlN piezo-optomechanical actuator chip and its computing applications［10］
Fig. 12. AlN piezo-optomechanical actuator chip and its optical isolator application［66］
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Table 1. Physical properties in different piezoelectric photonic platforms
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Table 2. Comparison of piezoelectric properties of AlN，AlSc（0.2）N，AlSc（0.4）N［29］
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Table 3. Structure and performance of ultralow-power piezo-optomechanically tuning
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Table 4. Structure and performance of acoustic-optic modulator
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