[1] Basting D. Excimer Laser Technology [Z]. Lambda Physik, 2001.

[3] Chivers K A. The challenge of extending optical lithography [C]. SPIE, 1999, 3741: 48-58.

[4] Michel B. An introduction to ultimate lithography [J]. Physique, 2006, 7: 837-840.

[5] Shimada T, Obara M, et al. An all solid-stade magnetic switching exciter for pumping excimer lasers [J]. Rev. Sci. Instrum, 1985, 56(11): 2018-2020.

[6] Simlanski, Byron S R, Burkes T R. Electrical excitation of an XeCl laser using magnetic pulse compression [J]. Appl. Phys. Lett., 1982, 40(7): 547-548.