Large-range displacement measurement in narrow space scenarios: fiber microprobe sensor with subnanometer accuracy

Chen Zhang; Yisi Dong; Pengcheng Hu; Haijin Fu; Hongxing Yang; Ruitao Yang; Yongkang Dong; Limin Zou; Jiubin Tan

doi:10.1364/PRJ.525667

Journals >Photonics Research >Volume 12 >Issue 9 >Page 1877 > Article

Photonics Research
Vol. 12, Issue 9, 1877 (2024)

Large-range displacement measurement in narrow space scenarios: fiber microprobe sensor with subnanometer accuracy

Chen Zhang^1,2,3, Yisi Dong^1,2,3,*, Pengcheng Hu^1,2,3,5, Haijin Fu^1,2,3..., Hongxing Yang^1,2,3, Ruitao Yang^1,2,3, Yongkang Dong^3,4, Limin Zou^1,2 and Jiubin Tan^1,2|Show fewer author(s)

Author Affiliations

¹Center of Ultra-precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, China

²Key Laboratory of Ultra-precision Intelligent Instrumentation, Harbin Institute of Technology, Harbin 150080, China

³Zhengzhou Research Institute, Harbin Institute of Technology, Zhengzhou 450000, China

⁴National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin 150001, China

⁵e-mail: hupc@hit.edu.cn

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DOI: 10.1364/PRJ.525667 Cite this Article Set citation alerts

Chen Zhang, Yisi Dong, Pengcheng Hu, Haijin Fu, Hongxing Yang, Ruitao Yang, Yongkang Dong, Limin Zou, Jiubin Tan, "Large-range displacement measurement in narrow space scenarios: fiber microprobe sensor with subnanometer accuracy," Photonics Res. 12, 1877 (2024) Copy Citation Text

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