[1] Xu Deyan, Wang Qing, Gao Zhishan et al.. Current Optical Elements Testing and International Standards[M]. Beijing: Science Press, 2009, 1~20
[2] Miao Erlong, Zhang Jian, Gu Yongqiang et al.. Measurement error analysis of high precision fizeau interferometer for lithography projection objective[J]. Chinese J. Lasers, 2010, 37(8): 2029~2034
[3] J. Schmit, K. Creath, M. Kujawinska. Spatial and temporal phase-measurement techniques: a comparison of major error sources in one-dimension[C]. SPIE, 1992, 1755: 202~211
[4] J. Schwider, R. Burow, K. E. Elssner et al.. Digital wavefront measuring interferometry: some systematic error sources[J]. Appl. Opt., 1983, 22(21): 3421~3432
[5] K. Creath. Phase-measurement interferometry: Beware these errors[C]. SPIE, 1991, 1553: 213~220
[6] Xing Tingwen, He Guoliang, Shu Liang. Measurement errors in the 193 nm phase-shifting point diffraction interferometer[J]. Opto-Electronic Engineering, 2009, 36(2): 67~72
[7] Ma Qiang, Liu Weiqi, Li Xiangbo et al.. Analysis of diffraction wavefront error in point diffraction interferometer[J]. Acta Optica Sinica, 2008, 28(12): 2321~2324
[8] Liu Dong, Yang Yongying, Tian Chao et al.. Analysis and correction of retrace error for nonull aspheric testing[J]. Acta Optica Sinica, 2009, 29(3): 688~696
[9] Xu Rongwei, Liu Liren, Liu Hongzhan et al.. Support schemes and thermal effect s analyses of large aperture interferometer mirrors[J]. Acta Optica Sinica, 2005, 25(6): 809~815
[10] Wu Qingwen, Lu E, Wang Jiaqi et al.. Study on the surface figure changes of primary mirror centerally supported under gravity load[J]. Opt. & Precision Engng., 1996, 4(4): 23~28
[11] Zhang Dejiang, Liu Liren, Xu Rongwei et al.. Finite element analysis for wavefront error of lenses induced by gravity[J]. Acta Optica Sinica, 2005, 25(4): 538~541
[12] Wu Xuhua, Chen Lei, Wang Lei. Design and test of reference mirror in Φ300 mm interferometer[J]. Opt. & Precision Engng., 2007, 15(8): 1235~1240
[13] Li Fu, Ruan Ping, Zhao Baochang. Study on the surface deformation of flat reflector under gravity load[J]. Acta Photonica Sinica, 2005, 34(2): 272~275
[14] P. A. Coronato, R. C. Juergens. Transferring FEA results to optics codes with Zernikes: review of techniques[C]. SPIE, 2003, 5176: 1~8