Influences of Laser Etching on Optical and Electrical Properties of Ag/FTO/AZO Thin Films

Yunlong Zhou; Min Lei; Chenlin Wang; Qian Xu; Baojia Li; Lijing Huang

doi:10.3788/CJL202249.0202007

[1] Seawsakul K, Horprathum M, Eiamchai P et al. Glancing-angle pulsed dc magnetron sputtered AZO thin films for TCO applications[J]. Materials Today: Proceedings, 5, 14166-14171(2018).

[2] Sakthivel P, Asaithambi S, Karuppaiah M et al. Improved optoelectronic properties of Gd doped cadmium oxide thin films through optimized film thickness for alternative TCO applications[J]. Journal of Alloys and Compounds, 820, 153188(2020).

[3] Leem J W, Song Y M, Lee Y T et al. Antireflective properties of AZO subwavelength gratings patterned by holographic lithography[J]. Applied Physics B, 99, 695-700(2010).

[4] Deng Z Y, Jia Q, Feng B et al. Research progress on fabrication and applications of high-performance films by pulsed laser deposition[J]. Chinese Journal of Lasers, 48, 0802010(2021).

[5] Li M L, Liu L, Shen Y. Effect of Ag layer thickness on properties of AZO/Ag/AZO transparent conductive films[J]. Vacuum, 57, 31-34(2020).

[6] Yu J Y, Gao Y, Wang L K et al. Anti-reductive properties of AZO/FTO bilayered transparent conducting films[J]. Surface Engineering, 36, 1-5(2020).

[7] Ren N F, Wang W Z, Li B J et al. Preparation and property optimization of silver-embedded FTO transparent conductive thin films by laser etching and coating AZO layer[J]. Journal of Materials Science: Materials in Electronics, 32, 10644-10661(2021).

[8] Mutitu J G, Shi S Y, Chen C H et al. Thin film solar cell design based on photonic crystal and diffractive grating structures[J]. Optics Express, 16, 15238-15248(2008).

[9] Wang T Y, Bian J T, Li X et al. Effect of laser induced periodic surface structures on infrared emission characteristics of copper films[J]. Chinese Journal of Lasers, 48, 0401017(2021).

[10] Ren N F, Huang L J, Li B J et al. Laser-assisted preparation and photoelectric properties of grating-structured Pt/FTO thin films[J]. Applied Surface Science, 314, 208-214(2014).

[11] Yang H, Huang S, Duan J et al. Contrastive study on laser ablation of single-crystal silicon by 1030 nm femtosecond laser and 355 nm nanosecond laser[J]. Chinese Journal of Lasers, 40, 0103003(2013).

[12] Zhang C, Zhang Q M, Guo L et al. Ablating process with 355 nm laser for amorphous silicon thin-film solar cell[J]. High Power Laser and Particle Beams, 24, 2751-2756(2012).

[13] Shang K W, Wu G, Liu X L et al. Femtosecond laser etching of aluminum film on Tedlar composite surfaces[J]. Chinese Journal of Lasers, 48, 1002117(2021).

[14] Mendes P M, Jacke S, Critchley K et al. Gold nanoparticle patterning of silicon wafers using chemical e-beam lithography[J]. Langmuir, 20, 3766-3768(2004).

[15] Takino H, Shibata N, Itoh H et al. Computer numerically controlled plasma chemical vaporization machining with a pipe electrode for optical fabrication[J]. Applied Optics, 37, 5198-5210(1998).

[16] Lang T T, Lin X F, He J J. Fabrication of silica-on-silicon arrayed waveguide gratings[J]. Acta Optica Sinica, 31, 0213003(2011).

[17] Yi P, Wu Y, Liu N et al. Intrusion detection for wireless mesh networks using finite state machine[J]. China Communications, 7, 40-48(2010).

[18] Chou S Y, Krauss P R, Renstrom P J. Imprint of sub-25 nm vias and trenches in polymers[J]. Applied Physics Letters, 67, 3114-3116(1995).

[19] Yamada R, Nomura N, Saida J J et al. Fabrication of optical gratings through surface patterning of zirconium-based metallic glass by laser irradiation[J]. Intermetallics, 93, 377-382(2018).

[20] Canteli D, Torres I, Fernández S et al. Photon-collection improvement from laser-textured AZO front-contact in thin-film solar cells[J]. Applied Surface Science, 463, 775-780(2019).

[21] Huang L J, Zhao L, Li B J et al. Improving optical and electrical performances of aluminum-doped zinc oxide thin films with laser-etched grating structures[J]. Ceramics International, 47, 7994-8003(2021).

[22] Huang L J, Li B J, Ren N F. Enhancing optical and electrical properties of Al-doped ZnO coated polyethylene terephthalate substrates by laser annealing using overlap rate controlling strategy[J]. Ceramics International, 42, 7246-7252(2016).

[23] Cho J S, Baek S H, Park S H et al. Effect of nanotextured back reflectors on light trapping in flexible silicon thin-film solar cells[J]. Solar Energy Materials and Solar Cells, 102, 50-57(2012).

[24] Tseng S F, Hsiao W T, Huang K C et al. The effect of laser patterning parameters on fluorine-doped tin oxide films deposited on glass substrates[J]. Applied Surface Science, 257, 8813-8819(2011).

[25] Berger J, Roch T, Correia S et al. Controlling the optical performance of transparent conducting oxides using direct laser interference patterning[J]. Thin Solid Films, 612, 342-349(2016).

[26] Huang L J, Zhang G M, Li H et al. Selective laser ablation and patterning on Ag thin films with width and depth control[J]. Journal of Materials Science, 31, 4943-4955(2020).

[27] Lin T C, Huang W C, Tsai F C. Hydrogen plasma effect toward the AZO/CuCr/AZO transparent conductive electrode[J]. Microelectronic Engineering, 167, 85-89(2017).

[28] Pillai S, Catchpole K R, Trupke T et al. Surface plasmon enhanced silicon solar cells[J]. Journal of Applied Physics, 101, 093105(2007).

[29] Ren N F, Zu W, Li B J et al. Research on laser irradiation treatment and photoelectric property of Ti/FTO composite films[J]. Chinese Journal of Lasers, 44, 0502004(2017).

[30] Hezam M, Tabet N, Mekki A. Synthesis and characterization of DC magnetron sputtered ZnO thin films under high working pressures[J]. Thin Solid Films, 518, e161-e164(2010).

[31] Guo K, Yu T, Song B B et al. Fabrication and opto-electronic properties of ZnO/Ag/ZnO composite films at room temperature[J]. Laser & Optoelectronics Progress, 54, 103102(2017).

[32] Demirhan Y, Koseoglu H, Turkoglu F et al. The controllable deposition of large area roll-to-roll sputtered Ito thin films for photovoltaic applications[J]. Renewable Energy, 146, 1549-1559(2020).