Yunlong Zhou, Min Lei, Chenlin Wang, Qian Xu, Baojia Li, Lijing Huang. Influences of Laser Etching on Optical and Electrical Properties of Ag/FTO/AZO Thin Films[J]. Chinese Journal of Lasers, 2022, 49(2): 0202007
- Chinese Journal of Lasers
- Vol. 49, Issue 2, 0202007 (2022)
Fig. 1. SEM images of thin films. (a) AZO film；(b) as-prepared Ag/FTO/AZO multilayer film
Fig. 2. SEM images of Ag/FTO/AZO multilayer films under different laser energy densities. (a) 0.1 J/cm2; (b) 0.3 J/cm2; (c) 0.7 J/cm2; (d) 1.3 J/cm2; (e) 2.1 J/cm2
Fig. 3. Heights of laser-etched grating structures on Ag/FTO/AZO multilayer films under different laser energy densities
Fig. 4. XRD patterns of different films
Fig. 5. Transmittance spectra of different films
Fig. 6. Average transmittance values (400800 nm) of different films
Fig. 7. Reflectance spectra of different films
Fig. 8. Average reflectances (400800 nm) of different films
Fig. 9. Sheet resistances of different films
Fig. 10. Figure-of-merits of different films
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