• Chinese Journal of Quantum Electronics
  • Vol. 35, Issue 5, 533 (2018)
Chenglin ZHU1、2、3、*, Xiaoquan HAN1、2, Zebin FENG1、2, and Mingqing HU4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    DOI: 10.3969/j.issn.1007-5461. 2018.05.004 Cite this Article
    ZHU Chenglin, HAN Xiaoquan, FENG Zebin, HU Mingqing. Temperature control system of excimer laser based on Smith prediction compensation[J]. Chinese Journal of Quantum Electronics, 2018, 35(5): 533 Copy Citation Text show less
    References

    [1] Richard C, Robert A, Dmitry Berger, et al. Gas discharge laser with gas temperature control[P]. USA: 2000.

    [2] Martelli G. Stability of PID-controlled second-order time-delay feedback system[J]. Automatica, 2009, 45(11): 2718-2722.

    [3] Smith O J M. Closed control of loops with dead time[J]. Chemical Engineering Progress, 1957, 53(5): 217-219.

    [5] Delmdahl R F. Power scaling of excimer lasers drivers display and lidar application[J]. Proceeding of SPIE, 2012, 8238: 82380A.

    [11] Wang Q G, Guo X, Zhang Y. Direct identification of continuous time delay system from step response[J]. Journal of Process Control, 2001, 11(5): 531-542(in Chinese).

    [12] Xu J X, Hang C C, Liu C. Parallel structure and tuning of fuzzy PID controller[J]. Automatica, 2000, 36: 673-684(in Chinese).

    [13] Mudi R K, Pal N R. A robust self-tuning scheme for PI and PID type fuzzy controllers[J]. IEEE Transactions on Fuzzy Stystems, 1999, 7(1): 2-16.

    ZHU Chenglin, HAN Xiaoquan, FENG Zebin, HU Mingqing. Temperature control system of excimer laser based on Smith prediction compensation[J]. Chinese Journal of Quantum Electronics, 2018, 35(5): 533
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