[1] KANJILAL A. K, NARAIN R, SHARMA R, et al. Automatic mask alignment without a microscope[J]. IEEE Transactions on Instrumentation and Measurement, 1995, 44(3): 806-809.

[2] Jingnan LIU,FURUHASHI H,TORII A, et al. Precision position control system using moire signals[J]. Industrial Electronics, Control, and Instrumentation, 1995, Proceedings of the 1995 IEEE IECON 21st International Conference on,1995,2: 968-972.

[3] Lizhong ZHOU,Hideo FURIHASHI,Yoshiyuki UCHIDA. Sensing characteristics of a precision aligner using moire gratings for precision alignment system[J]. Chinese Journal of Lasers B (English Edition),2001,10(4):257-262.