To solve the problem that the phase error of the optical phased array is difficult to calibrate, rotating element electric field vector calibration method is modified. Comparing with the traditional method, the new method modifies the algorithm and corrects the phase immediately after measuring the phase error of one unit, then measures and corrects the phase of the next unit. Possible π phase error in traditional method is avoided when large initial phase distribution and finite optical power measurement accuracy present. The simulation results show that the main lobe intensity calibrated with the original method reaches at most 70.8% of the ideal value on average, and the standard deviation is at least 19.1%. While after calibration with the modified method the main lobe intensity reaches at least 87.6% of the ideal value on average, the maximum standard deviation is 7.3%. The modified method produces statistically more accurate and predictable calibration result. A 9×9 optical phased array chip is manufactured. The initial grating lobe suppression ratio ofthe chip is 2.12 dB. Calibrated with this modified method the ratio reaches 4.68 dB. The effectiveness and practical application value of this method are proved.