• Journal of Infrared and Millimeter Waves
  • Vol. 31, Issue 6, 501 (2012)
XU Jia-Jia1、*, JIN Ju-Peng1、2, XU Qing-Qing1, XU Zhi-Cheng1、2, JIN Chuan1、2, ZHOU Yi1, CHEN Hong-Lei1, LIN Chun1, CHEN Jian-Xin1, and HE Li1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3724/sp.j.1010.2012.00501 Cite this Article
    XU Jia-Jia, JIN Ju-Peng, XU Qing-Qing, XU Zhi-Cheng, JIN Chuan, ZHOU Yi, CHEN Hong-Lei, LIN Chun, CHEN Jian-Xin, HE Li. 128×128 infrared focal plane arrays based on Type-II InAs/GaSb superlattice[J]. Journal of Infrared and Millimeter Waves, 2012, 31(6): 501 Copy Citation Text show less

    Abstract

    In this paper, we reported the growth and fabrication of a 128×128 infrared focal plane array detector made of type-II InAs/GaSb superlattice. The superlattice structure was grown on GaSb substrate using molecular beam epitaxy (MBE) technology. It consisted of 200 periods of 13ML(InAs)/9ML(GaSb) for longwave infrared detection. The pixel of the detector had a conventional PIN structure with a size of 40 μm×40 μm. The device fabrication process consisted of mesa etching, side-wall passivation, metallization and flip-chip hybridization with readout integrated circuit (ROIC). At 77 K, the detector had a 100% cut-off wavelength of 8.0 μm, and a peak detectivity of 6.0×109 cmHz1/2W-1. Concept proof of infrared imaging was also demonstrated with the focal plane array at liquid nitrogen temperature.
    XU Jia-Jia, JIN Ju-Peng, XU Qing-Qing, XU Zhi-Cheng, JIN Chuan, ZHOU Yi, CHEN Hong-Lei, LIN Chun, CHEN Jian-Xin, HE Li. 128×128 infrared focal plane arrays based on Type-II InAs/GaSb superlattice[J]. Journal of Infrared and Millimeter Waves, 2012, 31(6): 501
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