• Infrared and Laser Engineering
  • Vol. 44, Issue 2, 461 (2015)
Feng Aixin1、2、3、*, Zhuang Xuhua2, Xue Wei1, Han Zhenchun2、4, Sun Tietun3, Cheng Fengguo2, Zhong Guoqi2, Yin Cheng2, and He Ye2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    DOI: Cite this Article
    Feng Aixin, Zhuang Xuhua, Xue Wei, Han Zhenchun, Sun Tietun, Cheng Fengguo, Zhong Guoqi, Yin Cheng, He Ye. Damage characteristics of polysilicon under wavelengths of 1 064 nm, 532 nm and 355 nm laser irradiation[J]. Infrared and Laser Engineering, 2015, 44(2): 461 Copy Citation Text show less
    References

    [1] Stuart B C, Feit M D, Herman S, et al. Nanosecond-to-femtosecond laser-induced breakdown in dielectrics [J]. Phys Rev, 1996, B53(4): 749-1761.

    [2] Yuan Yonghua, Liu Songhao. Study of the characteristics of the surface ripple on Si material irradiated by pulsed laser[J]. Acta Optica Sinica, 2004, 24(2): 56-59. (in Chinese)

    [3] Wu Dongjiang, Ma Guangyi, Cao Xiansuo, et al. Analysis of silicon surface profile of pulsed laser bending processing [J]. Chinese J Lasers, 2007, 34(11): 1589-159. (in Chinese)

    [4] Yang Hongdao. Micro/Nano-structures on silicon surface by pulse laser[D]. Chengdu: Southwest University of Science and Technology, 2008. (in Chinese)

    [5] Zhang Lucheng, Wang Xuemeng, Sheng Hui. Application of laser thermal effects in fabrication process of high efficiency solar cells[J]. Laser & Optoelectronics Progress, 2009, 46(5): 41-45. (in Chinese)

    [6] Zhu Yaonan. Discussion of the measurement methods for laser induced damage threshold of optical coating[J]. Laser Technology, 2006, 30(5): 532-536. (in Chinese)

    [7] Sheng Zhonghua, Lu Jian, Ni Xiaowu. Study of the heating mechanism of a semiconductor irradiated by picosecond and nanosecond laser pulses[J]. Chinese J Lasers, 1999, 26(9): 859-863. (in Chinese)

    [8] Riedel D, Hernandez-Pozos J L, Palmer R E, et al. Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6[J]. Appl Surf A, 2004, 78(3): 381-385.

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    Feng Aixin, Zhuang Xuhua, Xue Wei, Han Zhenchun, Sun Tietun, Cheng Fengguo, Zhong Guoqi, Yin Cheng, He Ye. Damage characteristics of polysilicon under wavelengths of 1 064 nm, 532 nm and 355 nm laser irradiation[J]. Infrared and Laser Engineering, 2015, 44(2): 461
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