Fabrication Error Analysis of 4-step Binary Optic Elements

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Chinese Journal of Lasers >Volume 25 >Issue 5 >Page 415 > Article

Chinese Journal of Lasers
Vol. 25, Issue 5, 415 (1998)

Fabrication Error Analysis of 4-step Binary Optic Elements

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², [in Chinese]², and [in Chinese]²

Author Affiliations

¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication Error Analysis of 4-step Binary Optic Elements[J]. Chinese Journal of Lasers, 1998, 25(5): 415 Copy Citation Text

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Abstract

In this paper, an analytic formula is given to show the relationship between the diffractive efficiency and fabrication error of 4- step binary optic elements by using the scalar diffractive theory. The formula has been disscussed in some situations and compared with the results of simulation complished by us before. The results of the two methods agree well. The finding may play a role in guiding the fabrication of binary optic elements.

Keywords

diffractive efficiency fabrication error theoretical analysis binary optics

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication Error Analysis of 4-step Binary Optic Elements[J]. Chinese Journal of Lasers, 1998, 25(5): 415

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