[1] Boeij W P de, Pieternella R, Bouchoms I, et al.. Extending immersion lithography down to 1x nm production nodes[C]. SPIE, 2013, 8683: 86831L.
[2] Frank Staals, Alena Andryzhyieuskaya, Hans Bakker, et al.. Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner[C]. SPIE, 2011, 7973: 79731G.
[3] Bekaert J, Van Look L, Vandenberghe G, et al.. Characterization and control of dynamic lens heating effects under high volume manufacturing conditions[C]. SPIE, 2011, 7973: 79730V.
[4] Braat J, Janssen A J E M. Improved Ronchi test with extended source[J]. J Opt Soc AmA, 1999, 16(1): 131-140.
[5] D Flagello, R Socha, X Shi, et al.. Optimizing and enhancing optical systems to meet the low k1 challenge[C]. SPIE, 2003, 5040: 139-150.
[6] K Lai, G Gallatin, M Kerkhof, et al.. New paradigm in lens metrology for lithographic scanner: evaluation and exploration[C]. SPIE, 2004, 5377: 160-171.
[7] M A van de Kerkhof, W de Boeij, H Kok, et al.. Full optical column characterization of DUV lithographic projection tools[C]. SPIE, 2004, 5377: 1960-1970.
[8] Daniel Malacara. Optical Shop Test[M]. New York: John Wiley & Sons, 2007.
[9] A K Ray-Chaudhuri, K D Krenz, R P Nissen, et al.. Initial results from an extreme ultraviolet interferometer operating with a compact laser plasma source[J]. J Vac Sci Technol B, 1996, 14(6): 3964-3968.
[10] A K Ray-Chaudhuri, K D Krenz, C H Fields. At-wavelength characterization of an extreme ultraviolet camera from low to midspatial frequencies with a compact laser plasma source[J]. J Vac Sci Technol B, 1997, 15(6): 2462-2466.
[11] A K Ray-Chaudhuri, W Ng, F Cerrina, et al.. Alignment of a multilayer-coated imaging system using extreme ultraviolet Foucault and Ronchi interferometric testing[J]. J Vac Sci Technol B, 1995, 13(6): 3089-3093.
[12] Li Jie, Tang Feng, Wang Xiangzhao, et al.. System errors analysis of grating lateral shearing interferometer[J]. Chinese J Lasers, 2014, 41(5):0508006.
[13] Peter J de Groot, Leslie L Deck. New algorithms and errors analysis for sinusoidal phase shifting interferometry[C]. SPIE, 2008, 7063: 70630K.
[14] Peter J de Groot, Leslie L Deck. Numerical simulations of vibration in phase-shifting interferometry[J]. Appl Opt, 1996, 35(13): 2172-2178.
[15] Peter J de Groot. Vibration in phase shifting interferometry[J]. J Opt Soc Am A, 1995, 12(2): 354-365.
[16] Zhang Yu, Jin Chunshui, Ma Dongmei, et al.. Analysis of measuring errors for the visible light phase shifting point diffraction interferometer[J]. Infrared and Laser Engineering, 2012, 41(5):1351-1356.