Microlens Array Fabrication by Using Laser Direct Lithography System

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 16 >Issue 8 >Page 1194 > Article

Acta Optica Sinica
Vol. 16, Issue 8, 1194 (1996)

Microlens Array Fabrication by Using Laser Direct Lithography System

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Microlens Array Fabrication by Using Laser Direct Lithography System[J]. Acta Optica Sinica, 1996, 16(8): 1194 Copy Citation Text

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Abstract

In the paper, the method for fabrication of diffractive microlens array using laser direct lithography system and reactive etching machine is described. The diffractive efficiency and the fabricating errors are analyzed. The microlens array has been used in a minature Shack Hartmann wavefront sensor.

Keywords

diffractive optical element microlens array laser direct lithography

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Microlens Array Fabrication by Using Laser Direct Lithography System[J]. Acta Optica Sinica, 1996, 16(8): 1194

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