Photoluminescence of Silicon Nitride-Based ZnO Thin Film Developed with RF Magnetron Sputtering

CHEN Jing-han; YAO Wen-qing; ZHU Yong-fa

doi:10.3964/j.issn.1000-0593(2017)02-0391-03

Journals >Spectroscopy and Spectral Analysis >Volume 37 >Issue 2 >Page 391 > Article

Spectroscopy and Spectral Analysis
Vol. 37, Issue 2, 391 (2017)

Photoluminescence of Silicon Nitride-Based ZnO Thin Film Developed with RF Magnetron Sputtering

CHEN Jing-han^*, YAO Wen-qing, and ZHU Yong-fa

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[in Chinese]

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DOI: 10.3964/j.issn.1000-0593(2017)02-0391-03 Cite this Article

CHEN Jing-han, YAO Wen-qing, ZHU Yong-fa. Photoluminescence of Silicon Nitride-Based ZnO Thin Film Developed with RF Magnetron Sputtering[J]. Spectroscopy and Spectral Analysis, 2017, 37(2): 391 Copy Citation Text

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References

[1] ZHOU Yongfeng, YAO Changzhuang, YANG Qinglin, et al. Advanced Engineering Materials, 2016, 18(2): 236.

[4] Sun Chengwe, Xin Ping, Liu Zhiwen, et al. Applied Physics Letters, 2006, 88(22): 22914.

[5] Liu Di, Lv Yanhui, Zhu Yongfa, et al. Journal of Materials Chemistry A, 2014, 2: 15377.

CHEN Jing-han, YAO Wen-qing, ZHU Yong-fa. Photoluminescence of Silicon Nitride-Based ZnO Thin Film Developed with RF Magnetron Sputtering[J]. Spectroscopy and Spectral Analysis, 2017, 37(2): 391

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