• Opto-Electronic Engineering
  • Vol. 49, Issue 7, 220032 (2022)
Min Ma1、2、3, Lin Jin2、3, Hua Qin2、3, Jiandong Sun2、3, Lixiang Chen1, and Yunfei Sun1、*
Author Affiliations
  • 1School of Electronic and Information Engineering, Suzhou University of Science and Technology, Suzhou, Jiangsu 215009, China
  • 2Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu 215123, China
  • 3Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Key Laboratory of Nanodevices of Jiangsu Province, Suzhou, Jiangsu 215123, China
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    DOI: 10.12086/oee.2022.220032 Cite this Article
    Min Ma, Lin Jin, Hua Qin, Jiandong Sun, Lixiang Chen, Yunfei Sun. Design of terahertz focusing lens based on high-resistivity silicon metasurface[J]. Opto-Electronic Engineering, 2022, 49(7): 220032 Copy Citation Text show less
    (a) The integration model of an AlGaN/GaN terahertz detector and a metasurface lens; (b) Schematic diagram of phase regulation of metasurface element array; (c) Schematic diagram of terahertz antenna structure
    Fig. 1. (a) The integration model of an AlGaN/GaN terahertz detector and a metasurface lens; (b) Schematic diagram of phase regulation of metasurface element array; (c) Schematic diagram of terahertz antenna structure
    (a) and (c) show the schematic diagram of single-sided cell structure and its energy distribution; (b) and (d) show the schematic diagram of double-sided cell structure and its energy distribution
    Fig. 2. (a) and (c) show the schematic diagram of single-sided cell structure and its energy distribution; (b) and (d) show the schematic diagram of double-sided cell structure and its energy distribution
    The phase and transmittance curves of the single and double structure of metasurface lens vary with diameter
    Fig. 3. The phase and transmittance curves of the single and double structure of metasurface lens vary with diameter
    The two-dimensional phase distribution of metasurface lens
    Fig. 4. The two-dimensional phase distribution of metasurface lens
    (a) The array of single-sided metasurface lens; (b) The array of double-sided metasurface lens
    Fig. 5. (a) The array of single-sided metasurface lens; (b) The array of double-sided metasurface lens
    (a) and (c) show the field intensity distribution on the y-z plane and one-dimensional distribution on the y=0 of a single-sided structure when x =0 ; (b) and (d) are the field intensity distribution on the y-z surface when x=0 and one-dimensional distribution when y=0 of the double-sided metasurface lens; (e) and (g) are the field intensity distribution on the x-y plane and the one-dimensional distribution on y=0 when z=1.026 mm of the single-sided metasurface lens; (f) and (h) are the field intensity distribution on the x-y plane and the one-dimensional distribution on y=0 when z=1.067 mm of the double-sided metasurface lens
    Fig. 6. (a) and (c) show the field intensity distribution on the y-z plane and one-dimensional distribution on the y=0 of a single-sided structure when x =0 ; (b) and (d) are the field intensity distribution on the y-z surface when x=0 and one-dimensional distribution when y=0 of the double-sided metasurface lens; (e) and (g) are the field intensity distribution on the x-y plane and the one-dimensional distribution on y=0 when z=1.026 mm of the single-sided metasurface lens; (f) and (h) are the field intensity distribution on the x-y plane and the one-dimensional distribution on y=0 when z=1.067 mm of the double-sided metasurface lens
    Dispersion characteristics of double-sided metasurface lens
    Fig. 7. Dispersion characteristics of double-sided metasurface lens
    参数单位:mm
    d0.03~0.1
    P0.1
    H0.35
    h00.15
    h10.04
    h20.11
    Table 1. The detail parameters of unit structure
    参数
    工作频率/THz1
    超表面透镜衬底厚度H/mm0.35
    单面超表面透镜口径Ls/mm3
    双面超表面透镜口径Ld/mm3
    设计焦距f/mm1
    Table 2. Design parameters of metasurface lens
    材料及结构工作频率/THz数值孔径焦斑半高宽/μm聚焦效率/%参考文献
    Au:金 ;Cu:铜;Al:铝;BCB:苯并环丁烯
    V形天线(Au)+硅衬底0.750.712701[30]
    V形天线(Cu)+硅衬底1.10.78~0.95165~2062.7~5.2[33]
    方环槽(Al)-介质(BCB)-方环槽(Al)0.840.41(焦斑直径450)(电场增益5.2)[34]
    十字硅交叉3.110.1663024[35]
    硅方柱(双面)2.520.9247.524.2[36]
    硅圆柱(单面)12.5090.58.3 (电场增益6.5)本文工作
    硅圆柱(双面)12.5098.710.8(电场增益7.8)
    Table 3. Performance comparison of metasurface lens in terahertz band
    Min Ma, Lin Jin, Hua Qin, Jiandong Sun, Lixiang Chen, Yunfei Sun. Design of terahertz focusing lens based on high-resistivity silicon metasurface[J]. Opto-Electronic Engineering, 2022, 49(7): 220032
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