• Opto-Electronic Engineering
  • Vol. 35, Issue 1, 55 (2008)
CHU Xing-chun1、2、*, LV Hai-bao2, and ZHAO Shang-hong1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    CHU Xing-chun, LV Hai-bao, ZHAO Shang-hong. Wide-range Grating Interferometer with Nanometer Resolution[J]. Opto-Electronic Engineering, 2008, 35(1): 55 Copy Citation Text show less
    References

    [1] Marek DOBOSZ.High-resolution laser linear encoder with numerical error compensation[J].Optic Engineering,1999,38(6):968-973

    [3] LIN S T.A new moiré interferometer for measuring in-plane displacement[J].Experimental Mechanics,2001,41(2):140-143

    [4] DOBOSZ M.High-resolution laser transducer of linear displacement[J].Opt.Eng,1992,31(3):500-503

    [6] TAKEDA M,Ma H,KOBAYASHI S.Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry[J].Journal of the Optical Society of America,1982,72(1):156-160

    [7] QIAN Ke-mao.Windowed Fourier transform for fringe pattern analysis[J].Appl.Opt,2004,43(13):2695-2702

    [10] CHU Xing-chun,LV Hai-bao,CAO Jü-liang.Research on direction recognizing and subdividing method for moiré (Interference)fringes[J].Chinese Optical Letters,2003,1(12):692-694

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    [1] Gao Jinlei, Zong Mingcheng. Development of Symmetrical Double-Grating Interferometric Displacement Measuring System[J]. Chinese Journal of Lasers, 2016, 43(9): 904003

    [2] DU Yan-li, YANG Jing, YAN Hui-min. New Data Processing Method of Two-path Differential White Light Interference Spectrum[J]. Opto-Electronic Engineering, 2009, 36(5): 140

    [3] Zhou Shaolin, Yang Yong, Chen Wangfu, Yan Wei, Ma Ping, Jiang Wenbo, Hu Song, Tang Xiaoping. Dual-Grating-Based Nanometer Measurement[J]. Acta Optica Sinica, 2009, 29(3): 702

    CHU Xing-chun, LV Hai-bao, ZHAO Shang-hong. Wide-range Grating Interferometer with Nanometer Resolution[J]. Opto-Electronic Engineering, 2008, 35(1): 55
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