Experimental Study on Laser Processing Arrayed Conical Micro-Holes of CVD Diamond Films

Wang Peng; Zhang Fenglin; Liu Wenguang; Ouyang Chengda

doi:10.3788/lop53.111402

[1] Ma Guoxin, Xiang Peng, Qiu Shengbao, et al. Development of preparative technique and application of chemical vapor deposition diamond (film)［J］. Vacuum Electronics, 2009(5): 5-11.

[2] Lü Fanxiu. Progress in research and application development of CVD diamond film［J］. Transactions of Materials and Heat Treatment, 2010, 31(1): 15-28.

[3] Ding Guifu, Cao Ying, Li Xinyong, et al. Progress of the research on the micro-mechanical machining technique for CVD diamond film［J］. Diamond & Abrasives Engineering, 2003, 133(1): 6-11.

[4] Badzian A. Diamond challenged by hard materials: A reflection on developments in the last decades［J］. Materials Chemistry and Physics, 2001, 72(2): 110-113.

[5] Liao M Y, Meng X M, Zhou X T, et al. Nanodiamond formation by hot-filament chemical vapor deposition on carbon ions bombarded Si［J］. Journal of Crystal Growth, 2002, 236(1): 85-89.

[6] Wu Xiaojun, Zuo Dunwen, Xu Feng, et al. FEM analysis on the temperature field of CVD diamond film laser drilling［J］. Bulletin of the Chinese Ceramic Society, 2010, 29(1): 83-88.

[7] Song Yanjun, Tao Longfeng, Wang Lisheng. Problems and prospect for industrial application of CVD diamond film［J］. Cemented Carbide, 2013, 30(4): 230-236.

[8] Xing Songling, Liu Lei, Zou Guisheng, et al. Effects of femtosecond laser parameter on hole drilling of silica glass［J］. Chinese J Lasers, 2015, 42(4): 0403001.

[9] Wang Yuqian, Zhang Junzhan, Liu Yongsheng, et al. Effect of femtosecond laser parameters on TiC ceramic micro-hole drilling［J］. Chinese J Lasers, 2014, 41(10): 1003010.

[10] Xiao Lei, Zhao Jiantao, Yan Zhenfeng, et al. Technologic investigation of laser micro-drilling on the thin ceramic plate［J］. Acta Optica Sinica, 2014, 34(s1): s114012.

[11] Park J K, Ayres V M, Asmussen J, et al. Precision micromachining of CVD diamond films［J］. Diamond and Related Materials, 2000, 9(3): 1154-1158.

[12] Ohfuji H, Okuchi T, Odake S, et al. Micro-/nanostructural investigation of laser-cut surfaces of single-and polycrystalline diamonds［J］. Diamond and Related Materials, 2010, 20(7-9): 1040-1051.

[13] Zhang Wei. Structuring of coarse-grained diamond wheel surface via laser machining methods［D］. Harbin: Harbin Institute of Technology, 2012.

[14] Dong Haiyun. Study on minitaper laser drilling technique and technology［D］. Changchun: Changchun University of Science and Technology, 2004.

[15] Xin Fenglan. Research on the laser drilling of high quality［D］. Beijing: Beijing University of Technology, 2006.

[16] Kononenko T V, Ralchenko V G, Vlasov I I, et al. Ablation of CVD diamond with nanosecond laser pulses of UV-IR range［J］. Diamond and Related Materials, 2098, 7(11-12): 2023-2027.

[17] Kononenko T V, Komlenok M S, Pashinin V P, et al. Femtosecond laser microstructuring in the bulk of diamond［J］. Diamond and Related Materials, 2009, 20(2-3): 206-209.

[18] Ni Xiaochang, Hong Ru, Wang Qingyue, et al. Research of deep processing technology for femtosecond laser［J］. Journal of Tianjin University of Technology and Education, 2008, 20(3): 5-8.

[19] Gong Lei. Research on the laser drilling of Nd∶YAG［D］. Changchun: Changchun University of Science and Technology, 2008.

[20] Dring S, Richter S, Nolte S, et al. In situ imaging of hole shape evolution in ultrashort pulse laser drilling［J］. Optics Express, 2010, 20(20): 20395-20400.

[21] Dring S, Richter S, Tünnermann A, et al. Influence of pulse duration on the hole formation during short and ultrashort pulse laser deep drilling［C］. SPIE, 2012, 8247: 824720.