SiC/Mg Multilayer Film Reflective Mirror at 30.4 nm

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Journals >Acta Optica Sinica >Volume 27 >Issue 4 >Page 735 > Article

Acta Optica Sinica
Vol. 27, Issue 4, 735 (2007)

SiC/Mg Multilayer Film Reflective Mirror at 30.4 nm

[in Chinese]^1、*, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², and [in Chinese]²

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. SiC/Mg Multilayer Film Reflective Mirror at 30.4 nm[J]. Acta Optica Sinica, 2007, 27(4): 735 Copy Citation Text

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