• Opto-Electronic Engineering
  • Vol. 40, Issue 2, 100 (2013)
DENG Yafei*, ZHOU Jinyun, LEI Liang, RAN Zuo, and ZHOU Yamei
Author Affiliations
  • [in Chinese]
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    DOI: 10.3969/j.issn.1003-501x.2013.02.016 Cite this Article
    DENG Yafei, ZHOU Jinyun, LEI Liang, RAN Zuo, ZHOU Yamei. Novel Projection Lens Design for Large-area PCB Lithography[J]. Opto-Electronic Engineering, 2013, 40(2): 100 Copy Citation Text show less

    Abstract

    For large-area and high-density Printed Circuit Board (PCB) lithography, we use ZEMAX optical design software to design a kind of lithographic projection lens with 8 optics element. Symmetrical double Gaussian structure is applied in the lens, the magnification is -1, and numerical aperture NA = 0.06. It can exposure a area of Φ = 80 mm at a time, and have better than 7 μm resolution and 120 μm focus shift.The result of tolerance analysis show that the tightest tolerance is part of the element tilts, which should be lower than 0.017 °. We use the Monte Carlo method to simulate fabricating and assembling 50 group of lens. The results show 90% of the lens MTF > 0.58 at spatial frequency 72 line/mm, which can ensure more than 90% yield when they are fabricated and assembled.
    DENG Yafei, ZHOU Jinyun, LEI Liang, RAN Zuo, ZHOU Yamei. Novel Projection Lens Design for Large-area PCB Lithography[J]. Opto-Electronic Engineering, 2013, 40(2): 100
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