Terahertz (THz) waves have broad application prospects in fields such as communication, imaging, safety monitoring and biomedicine. With the rapid development of THz technology, the demands for its transmission waveguides, especially high-performance THz waveguides with low loss, single mode delivery and flexible transmission are increasing. This will provide important support for improving the flexibility of THz systems and promoting their practical development. We review the design and fabrication process of metallic waveguides and dielectric metallic waveguides, their characteristics of loss and single-polarization single-mode transmission in the frequency bands of 0.1?0.3 THz and 2.0?5.0 THz, as well as their applications in communication and imaging. We mainly focus on the research results of our research group in the design, characteristic simulation, fabrication, evaluation, and related applications of waveguides in recent years. And preliminary exploration is conducted on the difficulties and prospects in the development of THz waveguides.