• Chinese Optics Letters
  • Vol. 9, Issue 5, 053101 (2011)
Yuan Zhao1、2, Mingyu Sheng1、3, Yuxiang Zheng1, and Liangyao Chen1
Author Affiliations
  • 1Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
  • 2Department of Optical Electronics Information Engineering, Shanghai Second Polytechnic University, Shanghai 201209, China
  • 3Department of Electronics Information Engineering, Shanghai Business School, Shanghai 200235, China
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    DOI: 10.3788/COL201109.053101 Cite this Article Set citation alerts
    Yuan Zhao, Mingyu Sheng, Yuxiang Zheng, Liangyao Chen. Accurate analysis of ellipsometric data for thick transparent f ilms[J]. Chinese Optics Letters, 2011, 9(5): 053101 Copy Citation Text show less
    References

    [1] J. Hilfiker, N. Singh, T. Tiwald, D. Convey, S. Smith, J. Baker, and H. Tompkins, Thin Solid Films 516, 7979 (2008).

    [2] R. Shrestha, D. Yang, and E. Irene, Thin Solid Films 500, 252 (2006).

    [3] C. Walsh and E. Franses, Thin Solid Films 347, 167 (1999).

    [4] J. Rivory, Thin Solid Films 313, 333 (1998).

    [5] S. Colard and M. Mihailovic, Thin Solid Films 336, 362 (1998).

    [6] I. An, J. Nanophotonics 2, 021905 (2008).

    [7] M. Vinodh, L. Jeurgens, and E. Mittemijer, J. Appl. Phys. 100, 044903 (2006).

    [8] M. Camacho-Lopez, C. Sanchez-Perez, A. Esparza-Garcia, E. Ghibaudo, S. Rodil, S. Muhl, and L. Escobar-Alarcon, Proc. SPIE 5622, 545 (2004).

    [9] H. McKay, R. Feenstra, T. Schmidtling, U. Pohl, and J. Geisz, J. Vac. Sci. Technol. B 19, 1644 (2001).

    [10] S. Guo, G. Gustafsson, O. Hagel, and H. Arwin, Appl. Opt. 35, 1693 (1996).

    [11] S. Bosch, J. P′erez, and A. Canillas, Appl. Opt. 37, 1177 (1998).

    [12] J. Campmany, E. Bertran, A. Canillas, J. And′ujar, and J. Costa, J. Opt. Soc. Am. A 10, 713 (1993).

    [13] V. Odarich, J. Opt. Technol. 75, 132 (2008).

    [14] M. Sheng, Y. Wu, S. Feng, Y. Chen, Y. Zheng, and L. Chen, Appl. Opt. 46, 7049 (2007).

    [15] M. Klein, Optics (Wiley, New York, 1970).

    [16] R. Azzam and N. Bashara, Ellipsometry and polarized light (Elsevier, Amsterdam, 1985).

    [17] M. Yonghong, C. She, and J. Gang, Chin. Opt. Lett. 8, (Sup) 114 (2010).

    [18] W. Linjun, X. Yiben, S. Hujiang, Z. Minglong, Y. Ying, and W. Lin, Chin. Opt. Lett. 2, 308 (2004).

    [19] F. S. Levin, An introduction to quantum theory (Cambridge University Press, Cambridge, New York, 2002) chap.7.

    [20] L. Chen, X. Feng, Y. Su, H. Ma, and Y. Qian, Appl. Opt. 33, 1299 (1994).

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    Yuan Zhao, Mingyu Sheng, Yuxiang Zheng, Liangyao Chen. Accurate analysis of ellipsometric data for thick transparent f ilms[J]. Chinese Optics Letters, 2011, 9(5): 053101
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