Accurate analysis of ellipsometric data for thick transparent f ilms

Yuan Zhao; Mingyu Sheng; Yuxiang Zheng; Liangyao Chen

doi:10.3788/COL201109.053101

Journals >Chinese Optics Letters >Volume 9 >Issue 5 >Page 053101 > Article

Chinese Optics Letters
Vol. 9, Issue 5, 053101 (2011)

Accurate analysis of ellipsometric data for thick transparent f ilms

Yuan Zhao^1、2, Mingyu Sheng^1、3, Yuxiang Zheng¹, and Liangyao Chen¹

Author Affiliations

¹Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China

²Department of Optical Electronics Information Engineering, Shanghai Second Polytechnic University, Shanghai 201209, China

³Department of Electronics Information Engineering, Shanghai Business School, Shanghai 200235, China

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DOI: 10.3788/COL201109.053101 Cite this Article Set citation alerts

Yuan Zhao, Mingyu Sheng, Yuxiang Zheng, Liangyao Chen. Accurate analysis of ellipsometric data for thick transparent f ilms[J]. Chinese Optics Letters, 2011, 9(5): 053101 Copy Citation Text

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Yuan Zhao, Mingyu Sheng, Yuxiang Zheng, Liangyao Chen. Accurate analysis of ellipsometric data for thick transparent f ilms[J]. Chinese Optics Letters, 2011, 9(5): 053101

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