Yanjun Zhang, Yunchao Li, Xuwen Hu, Lu Zhang, Zhaojun Liu, Kaifang Zhang, Shihao Mou, Shougang Zhang, Shubin Yan. Micro-fabrication process of vapor cells for chip-scale atomic clocks[J]. Chinese Optics Letters, 2019, 17(4): 040202
- Chinese Optics Letters
- Vol. 17, Issue 4, 040202 (2019)
Fig. 1. Structure of vapor cell: (a) 3D structure of vapor cell; (b) cross section of vapor cell.
Fig. 2. Micro-fabrication steps of atomic vapor cell. DRIE, deep reactive ion etching.
Fig. 3. (a) 3D schematic of silicon pore structure; (b) wafer with vapor cells; (c) SEM image of DRIE of vapor cell; (d) enlarged partial view of micro-channel.
Fig. 4. Micro-fabricated vapor cell on top of a coin.
Fig. 5. Experimental setup for measurement of the optical-absorption spectrum. TLB, tunable laser; OI, optical isolator; PBS, polarizing beam splitter; NDF, neutral density filter; QWP, quarter-wave plate; M1, high-reflection mirror; PD, photodiode.
Fig. 6. D2 line absorption spectra of vapor cell.
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