Research progress of metalenses in mid-infrared band

Aoling LI; Huigao DUAN; Honghui JIA; Jianhua LI; Yueqiang HU

doi:10.37188/OPE.20223019.2313

Journals >Optics and Precision Engineering >Volume 30 >Issue 19 >Page 2313 > Article

Optics and Precision Engineering
Vol. 30, Issue 19, 2313 (2022)

Research progress of metalenses in mid-infrared band

Aoling LI¹, Huigao DUAN^1,3, Honghui JIA¹, Jianhua LI⁴, and Yueqiang HU^1,2,*

Author Affiliations

¹National Engineering Research Center for High-Efficiency Grinding， College of Mechanical and Vehicle Engineering， Hunan University， Changsha40082， China

²Advanced Manufacturing Laboratory of Micro-Nano Optical Devices， Shenzhen Research Institute， Hunan University， Shenzhen518000， China

³Greater Bay Area Institute for Innovation， Hunan University， Guangzhou51100， China

⁴National Key Laboratory of Science and Technology on Test Physics & Numerical Mathematical， Beijing100076， China

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DOI: 10.37188/OPE.20223019.2313 Cite this Article

Aoling LI, Huigao DUAN, Honghui JIA, Jianhua LI, Yueqiang HU. Research progress of metalenses in mid-infrared band[J]. Optics and Precision Engineering, 2022, 30(19): 2313 Copy Citation Text

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Fig. 1. High focusing efficiency metalens in mid-infrared^［36-40］

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Fig. 2. High focusing efficiency metalens in mid-infrared^［47-50］

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Fig. 3. Wide field-of view imaging metalens in mid-infrared^［59-63］

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Fig. 4. Polarization dependent imaging in mid-infrared^{［48，70-73］}

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Fig. 5. Tunable and reconfigurable imaging in mid-infrared^［80-83］

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Fig. 6. Other imaging applications with metalens^［84-86］

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聚焦效率	偏振敏感	焦距（mm） /NA	波长/μm	结构 /衬底
80%^b	否	80 /0.02	4.6^［35］	Au /SiO₂
78%^b	否	2 /0.45	4^［36］	α-Si：H /MgF₂
70.4%^b	否	~0.907 /0.36	6.5^［37］	Ge /Al₂O₃
75%^b	否	0.5 /0.707	5.2^［38］	PbTe /CaF₂
72%^b 77%^b	是	8 /0.45 40 /0.1	10.6^［39］	Si /BaF₂
52%^b （max）	否	0.158 /0.35	3~5^［40］	GaSb /GaSb

Table 1. Performance of mid-infrared high focusing efficiency metalenses

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聚焦效率	相位机制	焦距（mm）/焦移（%）	波长（μm）/NA	结构/衬底
20.7%^a（max）	PB与传播相位	0.026/1.85（max）	3.7~4.5/0.82^［47］	Si/CaF₂
~45%^b（max）	传播相位	~0.4/6.5（max）	3.5~5/0.42^［48］	Si/Si
34%^a（max）	PB与传播相位	~0.592/0.65（max）	9.6~11.6/0.32^［49］	Ge/Ge
~70%^a（avg）	传播相位	0.16/2.5（max）	3~5/0.235^［50］	ZnSe/CaF₂

Table 2. Performance of mid-infrared achromatic metalenses

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FOV	透镜层数	聚焦效率（%）	焦距（mm）/NA	波长/μm	结构/衬底
>170°	1	32~45^b	2 /0.24	5.2^［59］	PbTe/CaF₂
60°	2	9.1~20.6^a	0.88 /0.494	10~11^［62］	Si/Si
140°	1	~22.5~64^b	5.12 /0.761	10.6^［63］	Si/Si

Table 3. Index of mid-infrared wide field-of view metalenses

Aoling LI, Huigao DUAN, Honghui JIA, Jianhua LI, Yueqiang HU. Research progress of metalenses in mid-infrared band[J]. Optics and Precision Engineering, 2022, 30(19): 2313

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