Yan LUO, Yong-Qin HAO, Chang-Ling YAN. Design of high refractive index contrast subwavelength grating reflector for 940 nmVCSEL[J]. Journal of Infrared and Millimeter Waves, 2021, 40(6): 834
- Journal of Infrared and Millimeter Waves
- Vol. 40, Issue 6, 834 (2021)
Fig. 1. Schematic diagram of HCG
Fig. 2. Reflectance of different grating parameters versus wavelength in TE mode (a) grating period, (b) fill factor, (c) grating thickness, (d) stress buffer layer thickness
Fig. 3. Reflectivity as function of low refractive index sub-layer thickness and wavelength in TE mode
Fig. 4. （a）Reflectivity spectrum of TE-HCG（Λ= 0. 781 μm，f = 0.254，Tg= 0. 166 μm，TL=0. 189 μm，TA=0. 17 μm），（b）Reflectivity spectrum of TM-HCG（Λ= 0. 416 μm，f = 0.618，Tg= 0. 242 μm，TL=0. 109μm，TA=0. 175μm）
Fig. 5. The reflectivity spectrum of TE-HCG and the fill factor difference between the upper and lower gratings is 5%，10% and 15%
Fig. 6. The reflectivity spectrum of TM-HCG and the fill factor difference between the upper and lower gratings is 5%，10% and 15%
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Table 1. Optimal range of parameters for TE and TM
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