AlGaN metal-semiconductor-metal ultraviolet photodetectors on sapphire substrate with a low-temperature AlN buffer layer

Junqin Zhang; Yintang Yang; Hujun Jia

doi:10.3788/col201311.102304

Journals >Chinese Optics Letters >Volume 11 >Issue 10 >Page 102304 > Article

Chinese Optics Letters
Vol. 11, Issue 10, 102304 (2013)

AlGaN metal-semiconductor-metal ultraviolet photodetectors on sapphire substrate with a low-temperature AlN buffer layer

Junqin Zhang, Yintang Yang, and Hujun Jia

DOI: 10.3788/col201311.102304 Cite this Article Set citation alerts

Junqin Zhang, Yintang Yang, Hujun Jia. AlGaN metal-semiconductor-metal ultraviolet photodetectors on sapphire substrate with a low-temperature AlN buffer layer[J]. Chinese Optics Letters, 2013, 11(10): 102304 Copy Citation Text

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