• Infrared and Laser Engineering
  • Vol. 51, Issue 1, 20220005 (2022)
Yuqing Liu and Hongbo Sun
Author Affiliations
  • State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China
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    DOI: 10.3788/IRLA20220005 Cite this Article
    Yuqing Liu, Hongbo Sun. Progress and application of nonlinear laser manufacturing (Invited)[J]. Infrared and Laser Engineering, 2022, 51(1): 20220005 Copy Citation Text show less

    Abstract

    Ultrafast lasers refer to lasers with very narrow widths. Ultrafast laser has extremely high instantaneous power, and its interaction with matter presents a non-linear, nonequilibrium and multi-scale state. With the unique characteristics of ultrafast(short pulse duration), ultrahigh (high instantaneous power) and ultrafine (fine processing structure), the realized nonlinear laser manufacturing technology can break the limitations of traditional micro-nano manufacturing and realize the ultrafine processing of various difficult-to-machine materials and complex micronano structures. It demonstrates unique application value in frontier fields such as microoptics, biomedicine, and intelligent electronic devices with precision ranging from sub-micron to nanoscale. The frontiers of femtosecond laser micro/nano machining technology was focused on. Firstly, the processing characteristics of femtosecond laser technology and the main processing methods were introduced, including femtosecond laser direct writing and femtosecond laser parallel processing. Then, the frontier application fields of femtosecond laser processing technology were discussed, such as micro-nano optical devices, microfluidic devices, multifunctional structured surfaces and biomedical engineering. Finally, the future development trend and research direction of femtosecond laser processing technology were prospected.
    Yuqing Liu, Hongbo Sun. Progress and application of nonlinear laser manufacturing (Invited)[J]. Infrared and Laser Engineering, 2022, 51(1): 20220005
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