Yukun WANG, Zhongming ZHENG, Hao LONG, Yang MEI, Baoping ZHANG. Development and Challenges of Nitride Vertical-cavity Surface-emitting Lasers（Invited）[J]. Acta Photonica Sinica, 2022, 51(2): 0251203
- Acta Photonica Sinica
- Vol. 51, Issue 2, 0251203 (2022)
Fig. 1. Structure and emission spectra of the 363 nm VCSEL ［12］
Fig. 2. Structure，emission spectrum and output power of the 383 nm VCSEL ［56］
Fig. 3. FESEM image and PL spectra of the 343.7 nm VCSEL［57］
Fig. 5. Output characteristics of the HCG VCSEL［60］
Fig. 6. Structure，emission spectrum and output characteristic of the 375 nm VCSEL［61］
Fig. 7. Emission spectrum and output characteristic of the graded cavity length VCSEL［62］
Fig. 8. Structure，surface topography，emission spectrum and output characteristic of the 310 nm VCSEL［63］
Fig. 9. Structure，emission spectrum and output characteristic of the 275.9 nm VCSEL［65］
Fig. 10. Variation of internal quantum efficiency of AlGaN multiple quantum wells with dislocation density in quantum wells［68］
Fig. 12. Schematic diagram of the buried tunnel junction［98］
Fig. 13. Refractive index and absorption coefficient dispersion for multi-layer ITO films［98，100-101］
Fig. 14. Schematic diagram of a VCSEL with TJ［100］
Fig. 15. Structure of the 250 nm AlGaN MQW LED with MQB EBL［109］
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Table 1. Refractive indes and extinction coefficients for various transparent oxides around 300 nm
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Table 2. Typical thermal conductivities for some of the materials on the p-side of the VCSEL in Fig. 18 at room-temperature
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