Wenying Zhang, Haoran Zhu, Meixuan Li, Zexuan Guo, Ming Guo. Real-Time In-Situ Calibration for Angle Measuring Sensor Based on Autocollimator[J]. Chinese Journal of Lasers, 2019, 46(4): 0404005
- Chinese Journal of Lasers
- Vol. 46, Issue 4, 0404005 (2019)
Fig. 1. Angle measuring sensor
Fig. 2. Moire fringe pattern
Fig. 3. Circular grating eccentricity diagram
Fig. 4. Installation tilt error diagram
Fig. 5. Schematic of grating grid line position deviation
Fig. 6. Positional relationship between readhead and score line
Fig. 7. Readhead output schematic
Fig. 8. Calibration device and principle diagram
Fig. 9. System physical map
Fig. 10. Original error curve and post-calibration error curve
Fig. 11. Error curves
Fig. 12. Repeatability error curves
Fig. 13. Wide range continuous error curve
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