• Chinese Journal of Lasers
  • Vol. 46, Issue 4, 0404005 (2019)
Wenying Zhang1、2、*, Haoran Zhu3、*, Meixuan Li1、2, Zexuan Guo1、2, and Ming Guo1、2
Author Affiliations
  • 1 Institute for Interdisciplinary Quantum Information Technology, Jilin Engineering Normal University, Changchun, Jilin 130052, China
  • 2 Jilin Engineering Laboratory for Quantum Information Technology, Changchun, Jilin 130052, China
  • 3 School of Electronics and Information Engineering, Changchun University of Science and Technology, Changchun, Jilin 130022, China
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    DOI: 10.3788/CJL201946.0404005 Cite this Article Set citation alerts
    Wenying Zhang, Haoran Zhu, Meixuan Li, Zexuan Guo, Ming Guo. Real-Time In-Situ Calibration for Angle Measuring Sensor Based on Autocollimator[J]. Chinese Journal of Lasers, 2019, 46(4): 0404005 Copy Citation Text show less

    Abstract

    An in-situ calibration method based on the autocollimator is proposed. Based on the principle of circumferential closure and the nature of Fourier series, this paper establishes the functional relationship between the measured value and the ideal value. Using the deviation between the ideal scribing position and the actual scribing position, we obtain the calibration curves. The calibration principle is deduced and analyzed in detail. The calibration angle measurement system is built and verified by experiments. The experimental results show that the original angle measurement error of the single readhead angle measurement sensor is 734.8″, and the error after calibration is 2.4″, and the calibration effect is better than that of the commonly used harmonic compensation method. The repeatability of the calibration system is better than 0.13″. The in-situ calibration method can effectively reduce the angle measurement error, and the method is simple and the calibration efficiency is high.
    Wenying Zhang, Haoran Zhu, Meixuan Li, Zexuan Guo, Ming Guo. Real-Time In-Situ Calibration for Angle Measuring Sensor Based on Autocollimator[J]. Chinese Journal of Lasers, 2019, 46(4): 0404005
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