Analysis of Optical Emission Spectra from ICP of Ar in the Vicinity of Plasma Sheath

ZHAO Wen-feng; CHEN Jun-fang; MENG Ran

Journals >Spectroscopy and Spectral Analysis >Volume 29 >Issue 11 >Page 3134 > Article

Spectroscopy and Spectral Analysis
Vol. 29, Issue 11, 3134 (2009)

Analysis of Optical Emission Spectra from ICP of Ar in the Vicinity of Plasma Sheath

ZHAO Wen-feng^1、2、*, CHEN Jun-fang¹, and MENG Ran¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

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ZHAO Wen-feng, CHEN Jun-fang, MENG Ran. Analysis of Optical Emission Spectra from ICP of Ar in the Vicinity of Plasma Sheath[J]. Spectroscopy and Spectral Analysis, 2009, 29(11): 3134 Copy Citation Text

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References

[1] Qayyum A, Zeb Shaista, Naveed M A, et al. J. Appl. Phys., 2005, 98: 103303.

[2] Zhu Ximing, Pu Yikang. Phys. Plasmas, 2005, 12: 103501.

[3] Lee Minhyong, Chung Chinwook. Appl. Phys. Lett., 2005, 87: 131502.

[5] Lee Minhyong, Lee Kyeonghyo, Hyun Dongseok, et al. Appl. Phys. Lett., 2007, 90: 191502.

[8] Singh S V, Kempkes P, Soltwisch H. Appl. Phys. Lett., 2006, 89: 161501.

[9] Qayyum A, Zeb Shaista, Naveed M A. Journal of Quantitative Spectroscopy & Radiative Transfer, 2007, 107: 361.

[12] Davide Mariotti, Yoshiki Shimizu, Muoto Koshizaki. Appl. Phys. Lett., 2006, 89: 201502.

[14] Bogearts A, Gijbels R. J. Appl. Phys., 1998, 84: 121.

[15] Kosku N, Murakami H, Higashi S, et al. Applied Surface Science, 2005, 244: 39.

ZHAO Wen-feng, CHEN Jun-fang, MENG Ran. Analysis of Optical Emission Spectra from ICP of Ar in the Vicinity of Plasma Sheath[J]. Spectroscopy and Spectral Analysis, 2009, 29(11): 3134

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