Study on fabrication of gray-scale mask for diffractive optical elements

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 31 >Issue 10 >Page 21 > Article

Opto-Electronic Engineering
Vol. 31, Issue 10, 21 (2004)

Study on fabrication of gray-scale mask for diffractive optical elements

[in Chinese]¹, [in Chinese]², [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, and [in Chinese]¹

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on fabrication of gray-scale mask for diffractive optical elements[J]. Opto-Electronic Engineering, 2004, 31(10): 21 Copy Citation Text

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