[1] Sun Tengfei, Zhang Jun, Lv Haibing, et al. Influence of optical mirror surface contaminants on laser transmission characteristics[J]. Infrared and Laser Engineering, 2014, 43(5): 1444-1448. (in Chinese)
[3] Zhang Guiyan, Yuan Hongtao, Miao Tongqun. Total integrated scatterometer for the application in optical surface roughness measurement[J]. Infrared and Laser Engineering, 2007, 36(S1): 265-269. (in Chinese)
[4] Amra C. Light scattering from multilayer optics. Ⅰ. tools of investigation[J]. Journal of the Optical Society of America A, 1994, 11(1): 197-210.
[5] Elson J M. Theory of light scattering from a rough surfaces with an inhomogeneous dielectric permittivity[J]. Physical Review B, 1984, 30(10): 5460-5480.
[8] Pan Yongqiang, Wu Zhensen, Hang Lingxia, et al. Interface roughness of multilayer dielectric optical thin film[J]. Infrared and Laser Engineering, 2009, 38(3): 433-436. (in Chinese)