• Acta Optica Sinica
  • Vol. 21, Issue 6, 734 (2001)
[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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  • [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Analysis of Measuring Condition for Principle Angle in Spectroscopic Ellipsometry[J]. Acta Optica Sinica, 2001, 21(6): 734 Copy Citation Text show less
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    [3] Aspnes D E. Spectroscopic ellipsometry of solids. In Seraphin B O eds., Optical Properties of Solids-New Developments. Amsterdam: North-Holland, 1976. 799~846

    [4] Zaghloul A-R M, Azzam R M. Single-element rotating-polarizer ellipsometer: PSI meter. Surf. Sci., 1980, 96(1):168~173

    [5] Chen L Y, Lynch D W. Scanning ellipsometer by rotating polarizer and analyzer. Appl. Opt., 1987, 26(24):5221~5228

    [6] Woollam J A, Snyder P G, Rost M C. Variable angle spectroscopic ellipsometry: a nondestructive characterization technique for ultrathin and mutilayter materials. Thin Solid Films, 1988, 166(1):317~323

    [7] Jellison G E, Modine F A. Two-channel polarization modulation ellipsometer. Appl. Opt., 1990, 29(7):959~974

    [8] Klein M V, Furtak T E. Optics. 2nd Edit. New York: John Wiley & Sons Inc., 1986. 59~127

    [9] Chen L Y, Feng X W, Su Y et al.. Design of a scanning ellipsomter by synchronous rotation of the polarizer and analyzer. Appl. Opt., 1994, 33(7):1299~1305

    CLP Journals

    [1] Sun Yao, Wang Hong. Spectral Ellipsometry of Dielectric/Metal/Dielectric Transparent Conductive Multi-Layer Films[J]. Laser & Optoelectronics Progress, 2016, 53(10): 103101

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Analysis of Measuring Condition for Principle Angle in Spectroscopic Ellipsometry[J]. Acta Optica Sinica, 2001, 21(6): 734
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